IP Library › Granted Patent US 4,335,313
Granted Patent Utility
US 4,335,313 · App. 06/149,106

Method and apparatus for aligning an opaque mask with an integrated circuit wafer

Inventors: Justin Kreuzer, David H. Kittell
Patented Case View Patent ↗
Granted: Jun 15, 1982 Filed: May 12, 1980
Inventors
Justin Kreuzer
David H. Kittell
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,335,313
App. No.
06/149,106
Filed
1980-05-12
Granted
1982-06-15
Kind
A