IP Library › Granted Patent US 4,353,087
Granted Patent Utility
US 4,353,087 · App. 06/019,964

Automatic mask alignment

Inventors: Daniel G. Berry, David A. Markle
Patented Case View Patent ↗
Granted: Oct 5, 1982 Filed: Mar 12, 1979
Inventors
Daniel G. Berry
David A. Markle
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,353,087
App. No.
06/019,964
Filed
1979-03-12
Granted
1982-10-05
Kind
A