Granted Patent
Utility
US 4,373,991 · App. 06/343,604
Methods and apparatus for polishing a semiconductor wafer
Inventor:
Edward L. Banks
Patented Case
View Patent ↗
Granted: Feb 15, 1983
Filed: Jan 28, 1982
Inventor
Edward L. Banks
Assignee (at issue)
Western Electric Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.