IP Library › Granted Patent US 4,395,304
Granted Patent Utility
US 4,395,304 · App. 06/377,001

Selective etching of phosphosilicate glass

Inventors: Werner Kern, George L. Schnable
Patented Case View Patent ↗
Granted: Jul 26, 1983 Filed: May 11, 1982
Inventors
Werner Kern
George L. Schnable
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,395,304
App. No.
06/377,001
Filed
1982-05-11
Granted
1983-07-26
Kind
A