Granted Patent
Utility
US 4,401,687 · App. 06/320,451
Plasma deposition of silicon
Inventors:
Richard S. Rosler, George Engle
Patented Case
View Patent ↗
Granted: Aug 30, 1983
Filed: Nov 12, 1981
Inventors
Richard S. Rosler
George Engle
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.