Granted Patent
Utility
US 4,410,395 · App. 06/376,890
Method of removing bulk impurities from semiconductor wafers
Inventors:
Charles H. Weaver, Bela L. Kaltenekker
Patented Case
View Patent ↗
Granted: Oct 18, 1983
Filed: May 10, 1982
Inventors
Charles H. Weaver
Bela L. Kaltenekker
Assignee (at issue)
Fairchild Camera & Instrument Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.