Granted Patent
Utility
US 4,412,812 · App. 06/335,170
Vertical semiconductor furnace
Inventors:
Joseph P. Sadowski, Alan E. Lightfoot, Jeffrey M. Kowalski
Patented Case
View Patent ↗
Granted: Nov 1, 1983
Filed: Dec 28, 1981
Inventors
Joseph P. Sadowski
Alan E. Lightfoot
Jeffrey M. Kowalski
Assignee (at issue)
Mostek Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.