IP Library › Granted Patent US 4,425,038
Granted Patent Utility
US 4,425,038 · App. 06/312,488

Technique to modify wafer geometry

Inventors: Carlo La Fiandra, Burke E. Nelson
Patented Case View Patent ↗
Granted: Jan 10, 1984 Filed: Oct 19, 1981
Inventors
Carlo La Fiandra
Burke E. Nelson
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,425,038
App. No.
06/312,488
Filed
1981-10-19
Granted
1984-01-10
Kind
A