Granted Patent
Utility
US 4,464,223 · App. 06/538,593
Plasma reactor apparatus and method
Inventor:
Georges J. Gorin
Patented Case
View Patent ↗
Granted: Aug 7, 1984
Filed: Oct 3, 1983
Inventor
Georges J. Gorin
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.