IP Library › Granted Patent US 4,466,073
Granted Patent Utility
US 4,466,073 · App. 06/371,402

Wafer prealigner using pulsed vacuum spinners

Inventors: Gerard E. Boyan, Enso J. Maleri
Patented Case View Patent ↗
Granted: Aug 14, 1984 Filed: Apr 26, 1982
Inventors
Gerard E. Boyan
Enso J. Maleri
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,466,073
App. No.
06/371,402
Filed
1982-04-26
Granted
1984-08-14
Kind
A