IP Library › Granted Patent US 4,475,811
Granted Patent Utility
US 4,475,811 · App. 06/489,664

Overlay test measurement systems

Inventor: Timothy A. Brunner
Patented Case View Patent ↗
Granted: Oct 9, 1984 Filed: Apr 28, 1983
Inventor
Timothy A. Brunner
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,475,811
App. No.
06/489,664
Filed
1983-04-28
Granted
1984-10-09
Kind
A