IP Library Granted Patent US 4,497,878
Granted Patent Utility
US 4,497,878 · App. 06/405,724

Photomask material

Inventors: Takashi Hatano, Akira Maruyama
Patented Case View Patent ↗
Granted: Feb 5, 1985 Filed: Aug 6, 1982
Inventors
Takashi Hatano
Akira Maruyama
Assignee (at issue)
Konishiroku Photo Industry Co., Ltd.

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Quick Facts
Patent No.
US 4,497,878
App. No.
06/405,724
Filed
1982-08-06
Granted
1985-02-05
Kind
A