Granted Patent
Utility
US 4,503,807 · App. 06/614,783
Chemical vapor deposition apparatus
Inventors:
Satoshi Nakayama, Hideaki Takeuchi, Junichi Murota, Tatuhiko Hurukado, Shigeru Takeda, Masuo Suzuki, Harushige Kurokawa, Humihide Ikeda
Patented Case
View Patent ↗
Granted: Mar 12, 1985
Filed: May 29, 1984
Inventors
Satoshi Nakayama
Hideaki Takeuchi
Junichi Murota
Tatuhiko Hurukado
Shigeru Takeda
Masuo Suzuki
Harushige Kurokawa
Humihide Ikeda
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.