IP Library › Granted Patent US 4,508,812
Granted Patent Utility
US 4,508,812 · App. 06/606,506

Method of applying poly(methacrylic anhydride resist to a semiconductor

Inventor: Robert G. Brault
Patented Case View Patent ↗
Granted: Apr 2, 1985 Filed: May 3, 1984
Inventor
Robert G. Brault
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 4,508,812
App. No.
06/606,506
Filed
1984-05-03
Granted
1985-04-02
Kind
A