Granted Patent
Utility
US 4,534,047 · App. 06/568,776
Mask ring assembly for X-ray lithography
Inventors:
Warren Deschenaux, Gregory P. Hughes, Justin Kreuzer, Carlo La Fiandra
Patented Case
View Patent ↗
Granted: Aug 6, 1985
Filed: Jan 6, 1984
Inventors
Warren Deschenaux
Gregory P. Hughes
Justin Kreuzer
Carlo La Fiandra
Assignee (at issue)
PerkinElmer, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.