IP Library › Granted Patent US 4,538,105
Granted Patent Utility
US 4,538,105 · App. 06/489,641

Overlay test wafer

Inventor: Christopher P. Ausschnitt
Patented Case View Patent ↗
Granted: Aug 27, 1985 Filed: Apr 28, 1983
Inventor
Christopher P. Ausschnitt
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,538,105
App. No.
06/489,641
Filed
1983-04-28
Granted
1985-08-27
Kind
A