Granted Patent
Utility
US 4,581,103 · App. 06/647,580
Method of etching semiconductor material
Inventors:
Jules D. Levine, Millard J. Jensen
Patented Case
View Patent ↗
Granted: Apr 8, 1986
Filed: Sep 4, 1984
Inventors
Jules D. Levine
Millard J. Jensen
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.