Granted Patent
Utility
US 4,585,671 · App. 06/629,843
Formation process of amorphous silicon film
Inventors:
Nobuhisa Kitagawa, Masataka Hirose, Kazuyoshi Isogaya, Yoshinori Ashida
Patented Case
View Patent ↗
Granted: Apr 29, 1986
Filed: Jul 6, 1984
Inventors
Nobuhisa Kitagawa
Masataka Hirose
Kazuyoshi Isogaya
Yoshinori Ashida
Assignee (at issue)
Mitsui Toatsu Chemicals, Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.