Granted Patent
Utility
US 4,588,293 · App. 06/560,679
Method and apparatus for inspecting photomasks to detect defects
Inventor:
Norman N. Axelrod
Patented Case
View Patent ↗
Granted: May 13, 1986
Filed: Dec 12, 1983
Inventor
Norman N. Axelrod
Assignee (at issue)
PerkinElmer, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.