IP Library › Granted Patent US 4,633,051
Granted Patent Utility
US 4,633,051 · App. 06/554,978

Stable conductive elements for direct exposure to reactive environments

Inventor: Donald M. Olson
Patented Case View Patent ↗
Granted: Dec 30, 1986 Filed: Nov 23, 1983
Inventor
Donald M. Olson
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.

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Quick Facts
Patent No.
US 4,633,051
App. No.
06/554,978
Filed
1983-11-23
Granted
1986-12-30
Kind
A