Granted Patent
Utility
US 4,639,602 · App. 06/699,046
System for deflecting a beam of charged particles
Inventor:
Martin Henzler
Patented Case
View Patent ↗
Granted: Jan 27, 1987
Filed: Feb 7, 1985
Inventor
Martin Henzler
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.