Granted Patent
Utility
US 4,654,509 · App. 06/784,739
Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus
Inventors:
McDonald Robinson, Ronald D. Behee, Wiebe B. deBoer, Wayne Johnson
Patented Case
View Patent ↗
Granted: Mar 31, 1987
Filed: Oct 7, 1985
Inventors
McDonald Robinson
Ronald D. Behee
Wiebe B. deBoer
Wayne Johnson
Assignee (at issue)
Epsilon Limited Partnership
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.