Granted Patent
Utility
US 4,667,047 · App. 06/860,572
Method for producing monosilane and a tetraalkoxysilane
Inventors:
Naoshi Imaki, Junzo Haji, Yoko Misu
Patented Case
View Patent ↗
Granted: May 19, 1987
Filed: May 7, 1986
Inventors
Naoshi Imaki
Junzo Haji
Yoko Misu
Assignee (at issue)
Mitsubishi Chemical Industries, Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.