Granted Patent
Utility
US 4,668,366 · App. 06/790,673
Optical figuring by plasma assisted chemical transport and etching apparatus therefor
Inventor:
Charles B. Zarowin
Patented Case
View Patent ↗
Granted: May 26, 1987
Filed: Oct 23, 1985
Inventor
Charles B. Zarowin
Assignee (at issue)
PerkinElmer, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.