IP Library › Granted Patent US 4,682,614
Granted Patent Utility
US 4,682,614 · App. 06/759,426

Wafer processing machine

Inventors: James M. Silvernail, Dallas J. Schneider
Patented Case View Patent ↗
Granted: Jul 28, 1987 Filed: Jul 26, 1985
Inventors
James M. Silvernail
Dallas J. Schneider
Assignee (at issue)
FSI HOLDINGS, LLC

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 4,682,614
App. No.
06/759,426
Filed
1985-07-26
Granted
1987-07-28
Kind
A