Granted Patent
Utility
US 4,682,614 · App. 06/759,426
Wafer processing machine
Inventors:
James M. Silvernail, Dallas J. Schneider
Patented Case
View Patent ↗
Granted: Jul 28, 1987
Filed: Jul 26, 1985
Inventors
James M. Silvernail
Dallas J. Schneider
Assignee (at issue)
FSI HOLDINGS, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.