Granted Patent
Utility
US 4,698,509 · App. 06/701,711
High speed pattern generator for electron beam lithography
Inventors:
William Wells, David Robinson, Richard M. DeLuca, Eric D. Burwen
Patented Case
View Patent ↗
Granted: Oct 6, 1987
Filed: Feb 14, 1985
Inventors
William Wells
David Robinson
Richard M. DeLuca
Eric D. Burwen
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.