IP Library › Granted Patent US 4,703,434
Granted Patent Utility
US 4,703,434 · App. 06/602,878

Apparatus for measuring overlay error

Inventor: Timothy A. Brunner
Patented Case View Patent ↗
Granted: Oct 27, 1987 Filed: Apr 24, 1984
Inventor
Timothy A. Brunner
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,703,434
App. No.
06/602,878
Filed
1984-04-24
Granted
1987-10-27
Kind
A