Granted Patent
Utility
US 4,719,125 · App. 06/924,111
Cyclosilazane polymers as dielectric films in integrated circuit fabrication technology
Inventors:
Louis G. Anello, Satish K. Gupta, Stephen W. Kirtley, George S. Wooster, Ralph L. DePrenda
Patented Case
View Patent ↗
Granted: Jan 12, 1988
Filed: Nov 3, 1986
Inventors
Louis G. Anello
Satish K. Gupta
Stephen W. Kirtley
George S. Wooster
Ralph L. DePrenda
Assignee (at issue)
ALLIED CONSULTING, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.