IP Library Granted Patent US 4,719,167
Granted Patent Utility
US 4,719,167 · App. 06/825,902

Positive photoresist composition with 1,2 naphthoquinone diazide and novolak resin condensed from mixture of m-cresol, p-cresol, and 2,5-xylenol with formaldehyde

Inventors: Konoe Miura, Tameichi Ochiai, Yasuhiro Kameyama
Patented Case View Patent ↗
Granted: Jan 12, 1988 Filed: Feb 4, 1986
Inventors
Konoe Miura
Tameichi Ochiai
Yasuhiro Kameyama
Assignee (at issue)
Mitsubishi Chemical Industries, Ltd.

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Quick Facts
Patent No.
US 4,719,167
App. No.
06/825,902
Filed
1986-02-04
Granted
1988-01-12
Kind
A