IP Library › Granted Patent US 4,724,510
Granted Patent Utility
US 4,724,510 · App. 06/941,234

Electrostatic wafer clamp

Inventors: Thomas E. Wicker, Roger B. Lachenbruch
Patented Case View Patent ↗
Granted: Feb 9, 1988 Filed: Dec 12, 1986
Inventors
Thomas E. Wicker
Roger B. Lachenbruch
Assignee (at issue)
TEGAL CORPORATION

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Quick Facts
Patent No.
US 4,724,510
App. No.
06/941,234
Filed
1986-12-12
Granted
1988-02-09
Kind
A