Granted Patent
Utility
US 4,727,234 · App. 06/879,751
Laser-based system for the total repair of photomasks
Inventors:
Modest M. Oprysko, Peter L. Young, Mark W. Beranek
Patented Case
View Patent ↗
Granted: Feb 23, 1988
Filed: Jun 27, 1986
Inventors
Modest M. Oprysko
Peter L. Young
Mark W. Beranek
Assignee (at issue)
Gould Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.