Granted Patent
Utility
US 4,737,920 · App. 06/675,897
Method and apparatus for correcting rotational errors during inspection of reticles and masks
Inventor:
Haruo Ozawa
Patented Case
View Patent ↗
Granted: Apr 12, 1988
Filed: Nov 28, 1984
Inventor
Haruo Ozawa
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.