IP Library › Granted Patent US 4,742,020
Granted Patent Utility
US 4,742,020 · App. 06/680,140

Multilayering process for stress accommodation in deposited polysilicon

Inventor: Pradip K. Roy
Patented Case View Patent ↗
Granted: May 3, 1988 Filed: Feb 1, 1985
Inventor
Pradip K. Roy
Assignee (at issue)
American Telephone and Telegraph Company, AT&T Bell Laboratories

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Quick Facts
Patent No.
US 4,742,020
App. No.
06/680,140
Filed
1985-02-01
Granted
1988-05-03
Kind
A