Granted Patent
Utility
US 4,770,590 · App. 06/864,077
Method and apparatus for transferring wafers between cassettes and a boat
Inventors:
Jean Benoit Hugues, Lynn Weber, James E. Herlinger, Katsuhito Nishikawa, Donald L. Schuman, Gary Yee
Patented Case
View Patent ↗
Granted: Sep 13, 1988
Filed: May 16, 1986
Inventors
Jean Benoit Hugues
Lynn Weber
James E. Herlinger
Katsuhito Nishikawa
Donald L. Schuman
Gary Yee
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.