IP Library › Granted Patent US 4,780,617
Granted Patent Utility
US 4,780,617 · App. 06/915,027

Method for successive alignment of chip patterns on a substrate

Inventors: Toshikazu Umatate, Hiroyuki Suzuki
Patented Case View Patent ↗
Granted: Oct 25, 1988 Filed: Oct 3, 1986
Inventors
Toshikazu Umatate
Hiroyuki Suzuki
Assignee (at issue)
Nippon Kogaku K.K.

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Quick Facts
Patent No.
US 4,780,617
App. No.
06/915,027
Filed
1986-10-03
Granted
1988-10-25
Kind
A