Granted Patent
Utility
US 4,793,911 · App. 07/119,628
Apparatus for the production of coatings with a uniform thickness profile by cathode sputtering
Inventors:
Guenther Kemmerer, Hans Wolf
Patented Case
View Patent ↗
Granted: Dec 27, 1988
Filed: Nov 12, 1987
Inventors
Guenther Kemmerer
Hans Wolf
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.