Granted Patent
Utility
US 4,835,466 · App. 07/011,729
Apparatus and method for detecting spot defects in integrated circuits
Inventors:
Wojciech P. Maly, Michael E. Thomas
Patented Case
View Patent ↗
Granted: May 30, 1989
Filed: Feb 6, 1987
Inventors
Wojciech P. Maly
Michael E. Thomas
Assignee (at issue)
FAIRCHILD SEMICONDUCTOR CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.