Granted Patent
Utility
US 4,846,626 · App. 07/012,538
Wafer handling system
Inventor:
Orest Engelbrecht
Patented Case
View Patent ↗
Granted: Jul 11, 1989
Filed: Feb 9, 1987
Inventor
Orest Engelbrecht
Assignee (at issue)
PerkinElmer, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.