IP Library › Granted Patent US 4,859,563
Granted Patent Utility
US 4,859,563 · App. 07/023,689

Positive photoresist composition

Inventors: Konoe Miura, Tameichi Ochiai, Yasuhiro Kameyama
Patented Case View Patent ↗
Granted: Aug 22, 1989 Filed: Mar 9, 1987
Inventors
Konoe Miura
Tameichi Ochiai
Yasuhiro Kameyama
Assignee (at issue)
Mitsubishi Chemical Industries, Ltd.

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Quick Facts
Patent No.
US 4,859,563
App. No.
07/023,689
Filed
1987-03-09
Granted
1989-08-22
Kind
A