Granted Patent
Utility
US 4,891,247 · App. 07/214,909
Process for borosilicate glass films for multilevel metallization structures in semiconductor devices
Inventor:
Peter C. Shamshoian
Patented Case
View Patent ↗
Granted: Jan 2, 1990
Filed: Jun 29, 1988
Inventor
Peter C. Shamshoian
Assignee (at issue)
Watkins-Johnson Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.