Granted Patent
Utility
US 4,891,335 · App. 07/251,115
Semiconductor substrate heater and reactor process and apparatus
Inventor:
Michael A. McNeilly
Patented Case
View Patent ↗
Granted: Jan 2, 1990
Filed: Sep 29, 1988
Inventor
Michael A. McNeilly
Assignee (at issue)
Advantage Production Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.