Granted Patent
Utility
US 4,892,613 · App. 07/290,076
Process for etching light-shielding thin film
Inventors:
Noboru Motai, Sakae Tanaka, Yoshiaki Watanabe, Katsuo Shirai, Yaeko Suzuki, Yoshihisa Ogiwara, Kazunori Saito, Keiko Shibuki
Patented Case
View Patent ↗
Granted: Jan 9, 1990
Filed: Dec 27, 1988
Inventors
Noboru Motai
Sakae Tanaka
Yoshiaki Watanabe
Katsuo Shirai
Yaeko Suzuki
Yoshihisa Ogiwara
Kazunori Saito
Keiko Shibuki
Assignees (at issue)
Nippon Precision Circuits Inc.
Seikosha Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.