Granted Patent
Utility
US 4,901,668 · App. 07/282,113
Photo-chemical vapor deposition apparatus
Inventor:
Shingo Murakami
Patented Case
View Patent ↗
Granted: Feb 20, 1990
Filed: Dec 9, 1988
Inventor
Shingo Murakami
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.