Granted Patent
Utility
US 4,903,717 · App. 07/269,017
Support for slice-shaped articles and device for etching silicon wafers with such a support
Inventor:
Franz Sumnitsch
Patented Case
View Patent ↗
Granted: Feb 27, 1990
Filed: Nov 9, 1988
Inventor
Franz Sumnitsch
Assignee (at issue)
Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Gesellschaft m.b.H.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.