IP Library › Granted Patent US 4,907,035
Granted Patent Utility
US 4,907,035 · App. 06/842,145

Universal edged-based wafer alignment apparatus

Inventors: Daniel N. Galburt, Jere D. Buckley
Patented Case View Patent ↗
Granted: Mar 6, 1990 Filed: Mar 21, 1986
Inventors
Daniel N. Galburt
Jere D. Buckley
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,907,035
App. No.
06/842,145
Filed
1986-03-21
Granted
1990-03-06
Kind
A