IP Library › Granted Patent US 4,912,327
Granted Patent Utility
US 4,912,327 · App. 07/364,202

Pulsed microfocused ion beams

Inventor: Allen Robert Waugh
Patented Case View Patent ↗
Granted: Mar 27, 1990 Filed: Jun 9, 1989
Inventor
Allen Robert Waugh
Assignee (at issue)
VG Instruments Group Limited

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Quick Facts
Patent No.
US 4,912,327
App. No.
07/364,202
Filed
1989-06-09
Granted
1990-03-27
Kind
A