Granted Patent
Utility
US 4,928,438 · App. 07/357,351
Wafer processing film
Inventors:
Osamu Narimatsu, Michiyasu Ito, Kazuyoshi Komatsu, Yasuhiro Shibata
Patented Case
View Patent ↗
Granted: May 29, 1990
Filed: May 26, 1988
Inventors
Osamu Narimatsu
Michiyasu Ito
Kazuyoshi Komatsu
Yasuhiro Shibata
Assignee (at issue)
Mitsui Toatsu Chemicals, Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.