IP Library Granted Patent US 4,933,257
Granted Patent Utility
US 4,933,257 · App. 07/408,956

Positive quinone diazide photo-resist composition with antistatic agent

Inventors: Konoe Miura, Tameichi Ochiai, Yasuhiro Kameyama, Tooru Koyama, Takashi Okabe, Tomoharu Mametani
Patented Case View Patent ↗
Granted: Jun 12, 1990 Filed: Sep 18, 1989
Inventors
Konoe Miura
Tameichi Ochiai
Yasuhiro Kameyama
Tooru Koyama
Takashi Okabe
Tomoharu Mametani
Assignees (at issue)
MITSUBISHI ELECTRIC CORPORATION
Mitsubishi Chemical Industries, Ltd.

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Quick Facts
Patent No.
US 4,933,257
App. No.
07/408,956
Filed
1989-09-18
Granted
1990-06-12
Kind
A