Granted Patent
Utility
US 4,952,858 · App. 07/198,545
Microlithographic apparatus
Inventor:
Daniel N. Galburt
Patented Case
View Patent ↗
Granted: Aug 28, 1990
Filed: May 18, 1988
Inventor
Daniel N. Galburt
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.