IP Library Granted Patent US 4,960,581
Granted Patent Utility
US 4,960,581 · App. 07/322,415

Method for preparing gaseous metallic fluoride

Inventors: Isao Harada, Yukihiro Yoda, Naruyuki Iwanaga, Toshihiko Nishitsuji, Akio Kikkawa
Patented Case View Patent ↗
Granted: Oct 2, 1990 Filed: Mar 13, 1989
Inventors
Isao Harada
Yukihiro Yoda
Naruyuki Iwanaga
Toshihiko Nishitsuji
Akio Kikkawa
Assignee (at issue)
Mitsui Toatsu Chemicals, Incorporated

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Quick Facts
Patent No.
US 4,960,581
App. No.
07/322,415
Filed
1989-03-13
Granted
1990-10-02
Kind
A